Ecopia Corporation
Probe Station
Probe station is mechanical instrument to make it possible to move probe arm and tip precisely, and have them contact on the semiconductor device and wafer successfully. Probe station is used to get electrical properties of semiconductor samples, i.e IV, IR of semiconductor wafer and device by integrating with measurement unit. It helps probe tip end probing in micro distance and contact on the sample surface by using microscope and manipulator ( positioner )
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